Roughness profile

Topography

Height-dependent colour display

Pseudo 3D image of a sheet surface after
low-pass filtering

Roughness measuring system to SEP 1940

• Transfer of roughness profile data to a PC for computation of special, non-standard, function-relevant characteristics (measuring length up to 50 mm)

Topography scanning systems

• Air bearing XY table (150 x 150 mm, positioning accuracy < 1µm)
•  Sensors:
  > mechanical skid-less stylus system (stylus radii 1 and 5 µm)
  > contactless laser optical skid-less stylus system
  Measuring range (excl. z-axis motor) <= 1 mm 
   Resolution (vertical) <= 0.03 µm
• Resolution (horizontal) 0.5 µm 
• Evaluations (as examples):
  > Two- and three-dimensional roughness characteristics
  > Combination of roughness profiles
  > High-, low- and band-pass filtering
  > Bearing ratios and gradient distributions
  > Material or cavity above or below pre-given level
  > Power spectrum and cross spectrum
  > Three-dimensional representation:
  > grid lines
  > false colour images
  > pseudo 3-D images with virtual illumination